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Liu, Han, Xu, Kun, Zhang, Xujie, Ye, Peide D. (2012) The integration of high-k dielectric on two-dimensional crystals by atomic layer deposition. Applied Physics Letters, 100 (15). 152115pp. doi:10.1063/1.3703595

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Reference TypeJournal (article/letter/editorial)
TitleThe integration of high-k dielectric on two-dimensional crystals by atomic layer deposition
JournalApplied Physics Letters
AuthorsLiu, HanAuthor
Xu, KunAuthor
Zhang, XujieAuthor
Ye, Peide D.Author
Year2012 (April 9)Volume100
Issue15
PublisherAIP Publishing
DOIdoi:10.1063/1.3703595Search in ResearchGate
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Mindat Ref. ID8601307Long-form Identifiermindat:1:5:8601307:5
GUID0
Full ReferenceLiu, Han, Xu, Kun, Zhang, Xujie, Ye, Peide D. (2012) The integration of high-k dielectric on two-dimensional crystals by atomic layer deposition. Applied Physics Letters, 100 (15). 152115pp. doi:10.1063/1.3703595
Plain TextLiu, Han, Xu, Kun, Zhang, Xujie, Ye, Peide D. (2012) The integration of high-k dielectric on two-dimensional crystals by atomic layer deposition. Applied Physics Letters, 100 (15). 152115pp. doi:10.1063/1.3703595
In(2012, April) Applied Physics Letters Vol. 100 (15) AIP Publishing

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