Fukuda, Kenji, Suzuki, Seiji, Senzaki, Junji, Kosugi, Ryouji, Nagai, Kiyoko, Sekigawa, Toshihiro, Okushi, Hideyo, Yoshida, Sadafumi, Tanaka, Tomoyuki, Arai, Kazuo (2000) Effect of Off-Angle from Si (0001) Surface and Polytype on Surface Morphology of SiC and C-V Characteristics of SiC MOS Structures. Materials Science Forum, 338. 1283-1286 doi:10.4028/www.scientific.net/msf.338-342.1283
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Effect of Off-Angle from Si (0001) Surface and Polytype on Surface Morphology of SiC and C-V Characteristics of SiC MOS Structures | ||
Journal | Materials Science Forum | ||
Authors | Fukuda, Kenji | Author | |
Suzuki, Seiji | Author | ||
Senzaki, Junji | Author | ||
Kosugi, Ryouji | Author | ||
Nagai, Kiyoko | Author | ||
Sekigawa, Toshihiro | Author | ||
Okushi, Hideyo | Author | ||
Yoshida, Sadafumi | Author | ||
Tanaka, Tomoyuki | Author | ||
Arai, Kazuo | Author | ||
Year | 2000 (May) | Volume | 338 |
Publisher | Trans Tech Publications, Ltd. | ||
DOI | doi:10.4028/www.scientific.net/msf.338-342.1283Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 9849644 | Long-form Identifier | mindat:1:5:9849644:8 |
GUID | 0 | ||
Full Reference | Fukuda, Kenji, Suzuki, Seiji, Senzaki, Junji, Kosugi, Ryouji, Nagai, Kiyoko, Sekigawa, Toshihiro, Okushi, Hideyo, Yoshida, Sadafumi, Tanaka, Tomoyuki, Arai, Kazuo (2000) Effect of Off-Angle from Si (0001) Surface and Polytype on Surface Morphology of SiC and C-V Characteristics of SiC MOS Structures. Materials Science Forum, 338. 1283-1286 doi:10.4028/www.scientific.net/msf.338-342.1283 | ||
Plain Text | Fukuda, Kenji, Suzuki, Seiji, Senzaki, Junji, Kosugi, Ryouji, Nagai, Kiyoko, Sekigawa, Toshihiro, Okushi, Hideyo, Yoshida, Sadafumi, Tanaka, Tomoyuki, Arai, Kazuo (2000) Effect of Off-Angle from Si (0001) Surface and Polytype on Surface Morphology of SiC and C-V Characteristics of SiC MOS Structures. Materials Science Forum, 338. 1283-1286 doi:10.4028/www.scientific.net/msf.338-342.1283 | ||
In | (2000) Materials Science Forum Vol. 338. Trans Tech Publications, Ltd. |
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