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D'Anna, E., Leggieri, G., Luches, A., Martino, M., Perrone, A., Mengucci, P., Mihailescu, I.N. (1992) Multilayer titanium nitride and silicide structures synthesized by multipulse excimer laser irradiation. Applied Surface Science, 54. 353-357 doi:10.1016/0169-4332(92)90070-e

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Reference TypeJournal (article/letter/editorial)
TitleMultilayer titanium nitride and silicide structures synthesized by multipulse excimer laser irradiation
JournalApplied Surface Science
AuthorsD'Anna, E.Author
Leggieri, G.Author
Luches, A.Author
Martino, M.Author
Perrone, A.Author
Mengucci, P.Author
Mihailescu, I.N.Author
Year1992 (January)Volume54
PublisherElsevier BV
DOIdoi:10.1016/0169-4332(92)90070-eSearch in ResearchGate
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Mindat Ref. ID9895718Long-form Identifiermindat:1:5:9895718:9
GUID0
Full ReferenceD'Anna, E., Leggieri, G., Luches, A., Martino, M., Perrone, A., Mengucci, P., Mihailescu, I.N. (1992) Multilayer titanium nitride and silicide structures synthesized by multipulse excimer laser irradiation. Applied Surface Science, 54. 353-357 doi:10.1016/0169-4332(92)90070-e
Plain TextD'Anna, E., Leggieri, G., Luches, A., Martino, M., Perrone, A., Mengucci, P., Mihailescu, I.N. (1992) Multilayer titanium nitride and silicide structures synthesized by multipulse excimer laser irradiation. Applied Surface Science, 54. 353-357 doi:10.1016/0169-4332(92)90070-e
In(n.d.) Applied Surface Science Vol. 54. Elsevier BV

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D'Anna, E., Leggieri, G., Luches, A., Martino, M., Drigo, A.V., Majni, G., Mengucci, P., Mihailescu, I.N. (1990) Nitridation of titanium by multipulse excimer laser irradiation. Applied Surface Science, 46. 365-370 doi:10.1016/0169-4332(90)90171-u
D'Anna, E., Leggieri, G., Luches, A., Martino, M., Perrone, A., Majni, G., Mengucci, P., Alexandrescu, R., Mihailescu, I.N., Zemek, J. (1995) Excimer laser reactive ablation deposition of silicon nitride films. Applied Surface Science, 86. 170-174 doi:10.1016/0169-4332(94)00375-0
Luches, A., Leggieri, G., Martino, M., Perrone, A., Majni, G., Mengucci, P., Mihailescu, I.N. (1994) Laser reactive ablation deposition of nitride films. Applied Surface Science, 79. 244-249 doi:10.1016/0169-4332(94)90417-0
Luby, S., Majkova, E., D'Anna, E., Luches, A., Martino, M., Tufano, A., Majni, G. (1993) Tungsten silicide formation by multipulse excimer laser irradiation. Applied Surface Science, 69. 345-349 doi:10.1016/0169-4332(93)90531-f
Leggieri, G., Luches, A., Martino, M., Perrone, A., Alexandrescu, R., Barborica, A., Gyorgy, E., Mihailescu, I.N., Majni, G., Mengucci, P. (1996) Laser reactive ablation deposition of silicon carbide films. Applied Surface Science, 96. 866-869 doi:10.1016/0169-4332(95)00568-4
Boulmer-Leborgne, C., Hermann, J., Dubreuil, B., Brault, P., DeGiorgi, M.L., Leggieri, G., Luches, A., Martino, M., Perrone, A., Mihailescu, I.N., Ursu, I., Blondiaux, G., Debrun, J.L., Estrade, H., Rousseau, B. (1992) Direct carbidation of titanium as a result of multipulse UV-laser irradiation of titanium samples in an ambient methane gas. Applied Surface Science, 54. 349-352 doi:10.1016/0169-4332(92)90069-a
D'Anna, E., Leggieri, G., Luches, A., Nassisi, V., Perrone, A., Majni, G., Mengucci, P. (1989) Silicon carbide formation with e-beam and laser pulses. Applied Surface Science, 36. 500-510 doi:10.1016/0169-4332(89)90944-6
Craciun, V., Leggieri, G., Luches, A., Martino, M., Mihailescu, I.N., Ursu, I. (1989) Synthesis of metallic and semiconductor nitrides by multipulse laser irradiation of solid samples in ambient gases. Applied Surface Science, 43. 304-307 doi:10.1016/0169-4332(89)90230-4
De Giorgi, M.L., Leggieri, G., Luches, A., Martino, M., Perrone, A., Zocco, A., Barucca, G., Majni, G., Gyorgy, E., Mihailescu, I.N., Popescu, M. (1998) Carbon nitride films deposited by reactive laser ablation. Applied Surface Science, 127. 481-485 doi:10.1016/s0169-4332(97)00678-8
D’Anna, E., Leggieri, G., Luches, A., Martino, M., Drigo, A. V., Mihailescu, I. N., Ganatsios, S. (1991) Synthesis of pure titanium nitride layers by multipulse excimer laser irradiation of titanium foils in a nitrogen‐containing atmosphere. Journal of Applied Physics, 69 (3). 1687-1696 doi:10.1063/1.347213
Crǎciun, V., Mihǎilescu, I. N., Ursu, I., Crǎciunoiu, F., Corici, A., Leggieri, G., Luches, A., Nassisi, V., Martino, M. (1988) Multilayer metallization structures with titanium nitride and titanium silicide prepared by multipulse laser irradiation. Applied Physics Letters, 52 (15). 1225-1227 doi:10.1063/1.99674
 
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