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Asikainen, Timo, Ritala, Mikko, Leskelä, Markku, Prohaska, Thomas, Friedbacher, Gernot, Grasserbauer, Manfred (1996) AFM and STM studies on In2O3 and ITO thin films deposited by atomic layer epitaxy. Applied Surface Science, 99. 91-98 doi:10.1016/0169-4332(96)00110-9

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Reference TypeJournal (article/letter/editorial)
TitleAFM and STM studies on In2O3 and ITO thin films deposited by atomic layer epitaxy
JournalApplied Surface Science
AuthorsAsikainen, TimoAuthor
Ritala, MikkoAuthor
Leskelä, MarkkuAuthor
Prohaska, ThomasAuthor
Friedbacher, GernotAuthor
Grasserbauer, ManfredAuthor
Year1996 (June)Volume99
PublisherElsevier BV
DOIdoi:10.1016/0169-4332(96)00110-9Search in ResearchGate
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Mindat Ref. ID9898372Long-form Identifiermindat:1:5:9898372:2
GUID0
Full ReferenceAsikainen, Timo, Ritala, Mikko, Leskelä, Markku, Prohaska, Thomas, Friedbacher, Gernot, Grasserbauer, Manfred (1996) AFM and STM studies on In2O3 and ITO thin films deposited by atomic layer epitaxy. Applied Surface Science, 99. 91-98 doi:10.1016/0169-4332(96)00110-9
Plain TextAsikainen, Timo, Ritala, Mikko, Leskelä, Markku, Prohaska, Thomas, Friedbacher, Gernot, Grasserbauer, Manfred (1996) AFM and STM studies on In2O3 and ITO thin films deposited by atomic layer epitaxy. Applied Surface Science, 99. 91-98 doi:10.1016/0169-4332(96)00110-9
In(n.d.) Applied Surface Science Vol. 99. Elsevier BV

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Ritala, Mikko, Asikainen, Timo, Leskelä, Markku, Jokinen, Janne, Lappalainen, Reijo, Utriainen, Mikko, Niinistö, Lauri, Ristolainen, Eero (1997) Effects of intermediate zinc pulses on properties of TiN and NbN films deposited by atomic layer epitaxy. Applied Surface Science, 120. 199-212 doi:10.1016/s0169-4332(97)00387-5
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Asikainen, T., Ritala, M., Leskelä, M. (1994) Growth of In2S3 thin films by atomic layer epitaxy. Applied Surface Science, 82. 122-125 doi:10.1016/0169-4332(94)90206-2
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Ritala, Mikko, Leskelä, Markku (1994) Zirconium dioxide thin films deposited by ALE using zirconium tetrachloride as precursor. Applied Surface Science, 75. 333-340 doi:10.1016/0169-4332(94)90180-5
Elers, Kai-Erik, Ritala, Mikko, Leskelä, Markku, Rauhala, Eero (1994) NbCl5 as a precursor in atomic layer epitaxy. Applied Surface Science, 82. 468-474 doi:10.1016/0169-4332(94)90260-7
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