Fares, B., Dubois, C., Gautier, B., Dupuy, J.C., Cayrel, F., Gaudin, G. (2006) AFM study of the SIMS beam induced roughness in monocrystalline silicon in presence of initial surface or bulk defects of nanometric size. Applied Surface Science, 252. 6448-6451 doi:10.1016/j.apsusc.2006.02.253
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | AFM study of the SIMS beam induced roughness in monocrystalline silicon in presence of initial surface or bulk defects of nanometric size | ||
Journal | Applied Surface Science | ||
Authors | Fares, B. | Author | |
Dubois, C. | Author | ||
Gautier, B. | Author | ||
Dupuy, J.C. | Author | ||
Cayrel, F. | Author | ||
Gaudin, G. | Author | ||
Year | 2006 (July) | Volume | 252 |
Publisher | Elsevier BV | ||
DOI | doi:10.1016/j.apsusc.2006.02.253Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 9908596 | Long-form Identifier | mindat:1:5:9908596:6 |
GUID | 0 | ||
Full Reference | Fares, B., Dubois, C., Gautier, B., Dupuy, J.C., Cayrel, F., Gaudin, G. (2006) AFM study of the SIMS beam induced roughness in monocrystalline silicon in presence of initial surface or bulk defects of nanometric size. Applied Surface Science, 252. 6448-6451 doi:10.1016/j.apsusc.2006.02.253 | ||
Plain Text | Fares, B., Dubois, C., Gautier, B., Dupuy, J.C., Cayrel, F., Gaudin, G. (2006) AFM study of the SIMS beam induced roughness in monocrystalline silicon in presence of initial surface or bulk defects of nanometric size. Applied Surface Science, 252. 6448-6451 doi:10.1016/j.apsusc.2006.02.253 | ||
In | (n.d.) Applied Surface Science Vol. 252. Elsevier BV |
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