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Legrand, Jérémy, Pigeat, Philippe, Easwarakhanthan, Thomas, Rinnert, Hervé (2014) Structural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias. Applied Surface Science, 307. 189-196 doi:10.1016/j.apsusc.2014.04.013

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Reference TypeJournal (article/letter/editorial)
TitleStructural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias
JournalApplied Surface Science
AuthorsLegrand, JérémyAuthor
Pigeat, PhilippeAuthor
Easwarakhanthan, ThomasAuthor
Rinnert, HervéAuthor
Year2014 (July)Volume307
PublisherElsevier BV
DOIdoi:10.1016/j.apsusc.2014.04.013Search in ResearchGate
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Mindat Ref. ID9922929Long-form Identifiermindat:1:5:9922929:6
GUID0
Full ReferenceLegrand, Jérémy, Pigeat, Philippe, Easwarakhanthan, Thomas, Rinnert, Hervé (2014) Structural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias. Applied Surface Science, 307. 189-196 doi:10.1016/j.apsusc.2014.04.013
Plain TextLegrand, Jérémy, Pigeat, Philippe, Easwarakhanthan, Thomas, Rinnert, Hervé (2014) Structural and optical properties of magnetron-sputtered Er-doped AlN films grown under negative substrate bias. Applied Surface Science, 307. 189-196 doi:10.1016/j.apsusc.2014.04.013
In(n.d.) Applied Surface Science Vol. 307. Elsevier BV

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Rinnert, H., Hussain, S.S., Brien, V., Legrand, J., Pigeat, P. (2012) Photoluminescence properties of Er-doped AlN films prepared by magnetron sputtering. Journal of Luminescence, 132 (9) 2367-2370 doi:10.1016/j.jlumin.2012.04.008
Easwarakhanthan, T., Assouar, M. B., Pigeat, P., Alnot, P. (2005) Optical models for radio-frequency-magnetron reactively sputtered AlN films. Journal of Applied Physics, 98 (7). 73531pp. doi:10.1063/1.2076444
Uthanna, S., Nirupama, V., Pierson, J.F. (2010) Substrate temperature influenced structural, electrical and optical properties of dc magnetron sputtered MoO3 films. Applied Surface Science, 256. 3133-3137 doi:10.1016/j.apsusc.2009.11.086
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Brien, V., Pigeat, P. (2007) Microstructures diagram of magnetron sputtered AlN deposits: Amorphous and nanostructured films. Journal of Crystal Growth, 299 (1). 189-194 doi:10.1016/j.jcrysgro.2006.10.238
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