Kwok, H. L., Lam, Y. W., Wong, S. P., Poon, M. C. (1986) Mixing of phosphorus and antimony ions in silicon by recoil implantation. Journal of Materials Science Letters, 5 (6) 633-634 doi:10.1007/bf01731532
Reference Type | Journal (article/letter/editorial) | ||
---|---|---|---|
Title | Mixing of phosphorus and antimony ions in silicon by recoil implantation | ||
Journal | Journal of Materials Science Letters | ||
Authors | Kwok, H. L. | Author | |
Lam, Y. W. | Author | ||
Wong, S. P. | Author | ||
Poon, M. C. | Author | ||
Year | 1986 (June) | Volume | 5 |
Issue | 6 | ||
Publisher | Springer Science and Business Media LLC | ||
DOI | doi:10.1007/bf01731532Search in ResearchGate | ||
Generate Citation Formats | |||
Mindat Ref. ID | 16409861 | Long-form Identifier | mindat:1:5:16409861:9 |
GUID | 0 | ||
Full Reference | Kwok, H. L., Lam, Y. W., Wong, S. P., Poon, M. C. (1986) Mixing of phosphorus and antimony ions in silicon by recoil implantation. Journal of Materials Science Letters, 5 (6) 633-634 doi:10.1007/bf01731532 | ||
Plain Text | Kwok, H. L., Lam, Y. W., Wong, S. P., Poon, M. C. (1986) Mixing of phosphorus and antimony ions in silicon by recoil implantation. Journal of Materials Science Letters, 5 (6) 633-634 doi:10.1007/bf01731532 | ||
In | (1986, June) Journal of Materials Science Letters Vol. 5 (6) Springer Science and Business Media LLC |
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