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Mackus, Adriaan J. M., Schneider, Joel R., MacIsaac, Callisto, Baker, Jon G., Bent, Stacey F. (2019) Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review. Chemistry of Materials, 31. 1142-1183 doi:10.1021/acs.chemmater.8b02878

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Reference TypeJournal (article/letter/editorial)
TitleSynthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review
JournalChemistry of Materials
AuthorsMackus, Adriaan J. M.Author
Schneider, Joel R.Author
MacIsaac, CallistoAuthor
Baker, Jon G.Author
Bent, Stacey F.Author
Year2019 (February 26)Volume31
PublisherAmerican Chemical Society (ACS)
DOIdoi:10.1021/acs.chemmater.8b02878Search in ResearchGate
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Mindat Ref. ID4313355Long-form Identifiermindat:1:5:4313355:8
GUID0
Full ReferenceMackus, Adriaan J. M., Schneider, Joel R., MacIsaac, Callisto, Baker, Jon G., Bent, Stacey F. (2019) Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review. Chemistry of Materials, 31. 1142-1183 doi:10.1021/acs.chemmater.8b02878
Plain TextMackus, Adriaan J. M., Schneider, Joel R., MacIsaac, Callisto, Baker, Jon G., Bent, Stacey F. (2019) Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review. Chemistry of Materials, 31. 1142-1183 doi:10.1021/acs.chemmater.8b02878
In(2019) Chemistry of Materials Vol. 31. American Chemical Society (ACS)

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Baker, Jon G., Schneider, Joel R., de Paula, Camila, Mackus, Adriaan J.M., Bent, Stacey F. (2021) Identification of highly active surface iron sites on Ni(OOH) for the oxygen evolution reaction by atomic layer deposition. Journal of Catalysis, 394. 476-485 doi:10.1016/j.jcat.2020.09.035
Baker, Jon G., Schneider, Joel R., Raiford, James A., Paula, Camila de, Bent, Stacey F. (2020) Nucleation Effects in the Atomic Layer Deposition of Nickel–Aluminum Oxide Thin Films. Chemistry of Materials, 32. 1925-1936 doi:10.1021/acs.chemmater.9b04630
Mackus, Adriaan J. M., MacIsaac, Callisto, Kim, Woo-Hee, Bent, Stacey F. (2017) Incomplete elimination of precursor ligands during atomic layer deposition of zinc-oxide, tin-oxide, and zinc-tin-oxide. The Journal of Chemical Physics, 146 (5). 52802pp. doi:10.1063/1.4961459
Schneider, Joel R., de Paula, Camila, Richey, Nathaniel E., Baker, Jon G., Oyakhire, Solomon T., Bent, Stacey F. (2022) Understanding and Utilizing Reactive Oxygen Reservoirs in Atomic Layer Deposition of Metal Oxides with Ozone. Chemistry of Materials, 34 (12) 5584-5597 doi:10.1021/acs.chemmater.2c00753
Vos, Martijn F. J., Chopra, Sonali N., Verheijen, Marcel A., Ekerdt, John G., Agarwal, Sumit, Kessels, Wilhelmus M. M., Mackus, Adriaan J. M. (2019) Area-Selective Deposition of Ruthenium by Combining Atomic Layer Deposition and Selective Etching. Chemistry of Materials, 31. 3878-3882 doi:10.1021/acs.chemmater.9b00193
Singh, Joseph A., Thissen, Nick F. W., Kim, Woo-Hee, Johnson, Hannah, Kessels, Wilhelmus M. M., Bol, Ageeth A., Bent, Stacey F., Mackus, Adriaan J. M. (2018) Area-Selective Atomic Layer Deposition of Metal Oxides on Noble Metals through Catalytic Oxygen Activation. Chemistry of Materials, 30. 663-670 doi:10.1021/acs.chemmater.7b03818
Mackus, Adriaan J. M., Merkx, Marc J. M., Kessels, Wilhelmus M. M. (2019) From the Bottom-Up: Toward Area-Selective Atomic Layer Deposition with High Selectivity. Chemistry of Materials, 31. 2-12 doi:10.1021/acs.chemmater.8b03454
Mameli, Alfredo, Karasulu, Bora, Verheijen, Marcel A., Barcones, Beatriz, Macco, Bart, Mackus, Adriaan J. M., Kessels, Wilhelmus M. M. Erwin, Roozeboom, Fred (2019) Area-Selective Atomic Layer Deposition of ZnO by Area Activation Using Electron Beam-Induced Deposition. Chemistry of Materials, 31. 1250-1257 doi:10.1021/acs.chemmater.8b03165
Mackus, Adriaan J. M., Leick, Noémi, Baker, Layton, Kessels, Wilhelmus M. M. (2012) Catalytic Combustion and Dehydrogenation Reactions during Atomic Layer Deposition of Platinum. Chemistry of Materials, 24. 1752-1761 doi:10.1021/cm203812v
Bobb-Semple, Dara, Nardi, Katie Lynn, Draeger, Nerissa, Hausmann, Dennis M., Bent, Stacey F. (2019) Area-Selective Atomic Layer Deposition Assisted by Self-Assembled Monolayers: A Comparison of Cu, Co, W, and Ru. Chemistry of Materials, 31. 1635-1645 doi:10.1021/acs.chemmater.8b04926
Weber, Matthieu J., Mackus, Adriaan J. M., Verheijen, Marcel A., van der Marel, Cees, Kessels, Wilhelmus M. M. (2012) Supported Core/Shell Bimetallic Nanoparticles Synthesis by Atomic Layer Deposition. Chemistry of Materials, 24. 2973-2977 doi:10.1021/cm301206e
 
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