Watch the Dallas Symposium LIVE, and fundraiser auction
Ticket proceeds support mindat.org! - click here...
Log InRegister
Quick Links : The Mindat ManualThe Rock H. Currier Digital LibraryMindat Newsletter [Free Download]
Home PageAbout MindatThe Mindat ManualHistory of MindatCopyright StatusWho We AreContact UsAdvertise on Mindat
Donate to MindatCorporate SponsorshipSponsor a PageSponsored PagesMindat AdvertisersAdvertise on Mindat
Learning CenterWhat is a mineral?The most common minerals on earthInformation for EducatorsMindat ArticlesThe ElementsThe Rock H. Currier Digital LibraryGeologic Time
Minerals by PropertiesMinerals by ChemistryAdvanced Locality SearchRandom MineralRandom LocalitySearch by minIDLocalities Near MeSearch ArticlesSearch GlossaryMore Search Options
Search For:
Mineral Name:
Locality Name:
Keyword(s):
 
The Mindat ManualAdd a New PhotoRate PhotosLocality Edit ReportCoordinate Completion ReportAdd Glossary Item
Mining CompaniesStatisticsUsersMineral MuseumsClubs & OrganizationsMineral Shows & EventsThe Mindat DirectoryDevice SettingsThe Mineral Quiz
Photo SearchPhoto GalleriesSearch by ColorNew Photos TodayNew Photos YesterdayMembers' Photo GalleriesPast Photo of the Day GalleryPhotography

Kambham, A.K., Mody, J., Gilbert, M., Koelling, S., Vandervorst, W. (2011) Atom-probe for FinFET dopant characterization. Ultramicroscopy, 111 (6). 535-539 doi:10.1016/j.ultramic.2011.01.017

Advanced
   -   Only viewable:
Reference TypeJournal (article/letter/editorial)
TitleAtom-probe for FinFET dopant characterization
JournalUltramicroscopy
AuthorsKambham, A.K.Author
Mody, J.Author
Gilbert, M.Author
Koelling, S.Author
Vandervorst, W.Author
Year2011 (May)Volume111
Issue6
PublisherElsevier BV
DOIdoi:10.1016/j.ultramic.2011.01.017Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID4906950Long-form Identifiermindat:1:5:4906950:1
GUID0
Full ReferenceKambham, A.K., Mody, J., Gilbert, M., Koelling, S., Vandervorst, W. (2011) Atom-probe for FinFET dopant characterization. Ultramicroscopy, 111 (6). 535-539 doi:10.1016/j.ultramic.2011.01.017
Plain TextKambham, A.K., Mody, J., Gilbert, M., Koelling, S., Vandervorst, W. (2011) Atom-probe for FinFET dopant characterization. Ultramicroscopy, 111 (6). 535-539 doi:10.1016/j.ultramic.2011.01.017
In(2011, May) Ultramicroscopy Vol. 111 (6) Elsevier BV

See Also

These are possibly similar items as determined by title/reference text matching only.

Gilbert, M., Vandervorst, W., Koelling, S., Kambham, A.K. (2011) Atom probe analysis of a 3D finFET with high-k metal gate. Ultramicroscopy, 111 (6). 530-534 doi:10.1016/j.ultramic.2010.12.025
Koelling, S., Innocenti, N., Hellings, G., Gilbert, M., Kambham, A.K., De Meyer, K., Vandervorst, W. (2011) Characteristics of cross-sectional atom probe analysis on semiconductor structures. Ultramicroscopy, 111 (6). 540-545 doi:10.1016/j.ultramic.2011.01.004
Koelling, S., Innocenti, N., Bogdanowicz, J., Vandervorst, W. (2013) Optimal laser positioning for laser-assisted atom probe tomography. Ultramicroscopy, 132. 70-74 doi:10.1016/j.ultramic.2013.03.003
Koelling, S., Innocenti, N., Schulze, A., Gilbert, M., Kambham, A. K., Vandervorst, W. (2011) In-situ observation of non-hemispherical tip shape formation during laser-assisted atom probe tomography. Journal of Applied Physics, 109 (10). 104909pp. doi:10.1063/1.3592339
Kambham, Ajay Kumar, Kumar, Arul, Gilbert, Matthieu, Vandervorst, Wilfried (2013) 3D site specific sample preparation and analysis of 3D devices (FinFETs) by atom probe tomography. Ultramicroscopy, 132. 65-69 doi:10.1016/j.ultramic.2012.09.013
Kumar, Arul, Komalan, Manu P., Lenka, Haraprasanna, Kambham, Ajay Kumar, Gilbert, Matthieu, Gencarelli, Federica, Vincent, Benjamin, Vandervorst, Wilfried (2013) Atomic insight into Ge1−xSnx using atom probe tomography. Ultramicroscopy, 132. 171-178 doi:10.1016/j.ultramic.2013.02.009
Kölling, S., Vandervorst, W. (2009) Failure mechanisms of silicon-based atom-probe tips. Ultramicroscopy, 109 (5). 486-491 doi:10.1016/j.ultramic.2008.11.013
Vandervorst, Wilfried, Schulze, Andreas, Kambham, Ajay Kumar, Mody, Jay, Gilbert, Matthieu, Eyben, Pierre (2014) Dopant/carrier profiling for 3D-structures. physica status solidi (c), 11 (1). 121-129 doi:10.1002/pssc.201300329
Bogdanowicz, J., Kumar, A., Fleischmann, C., Gilbert, M., Houard, J., Vella, A., Vandervorst, W. (2018) Laser-assisted atom probe tomography of semiconductors: The impact of the focused-ion beam specimen preparation. Ultramicroscopy, 188. 19-23 doi:10.1016/j.ultramic.2018.03.001
Sonestedt, M., Stiller, K. (2011) Using atom probe tomography to analyse MAX-phase materials. Ultramicroscopy, 111 (6). 642-647 doi:10.1016/j.ultramic.2010.12.031
Lefebvre, W., Philippe, T., Vurpillot, F. (2011) Application of Delaunay tessellation for the characterization of solute-rich clusters in atom probe tomography. Ultramicroscopy, 111 (3). 200-206 doi:10.1016/j.ultramic.2010.11.034
 
and/or  
Mindat.org is an outreach project of the Hudson Institute of Mineralogy, a 501(c)(3) not-for-profit organization.
Copyright © mindat.org and the Hudson Institute of Mineralogy 1993-2025, except where stated. Most political location boundaries are © OpenStreetMap contributors. Mindat.org relies on the contributions of thousands of members and supporters. Founded in 2000 by Jolyon Ralph.
To cite: Ralph, J., Von Bargen, D., Martynov, P., Zhang, J., Que, X., Prabhu, A., Morrison, S. M., Li, W., Chen, W., & Ma, X. (2025). Mindat.org: The open access mineralogy database to accelerate data-intensive geoscience research. American Mineralogist, 110(6), 833–844. doi:10.2138/am-2024-9486.
Privacy Policy - Terms & Conditions - Contact Us / DMCA issues - Report a bug/vulnerability Current server date and time: August 23, 2025 02:12:32
Go to top of page