Wang, Yanrong, Yang, Hong, Xu, Hao, Luo, Weichun, Qi, Luwei, Zhang, Shuxiang, Wang, Wenwu, Yan, Jiang, Zhu, Huilong, Zhao, Chao, Chen, Dapeng, Ye, Tianchun (2017) Stress-induced leakage current characteristics of PMOS fabricated by a new multi-deposition multi-annealing technique with full gate last process. Chinese Physics B, 26. 87304pp. doi:10.1088/1674-1056/26/8/087304
| Reference Type | Journal (article/letter/editorial) | ||
|---|---|---|---|
| Title | Stress-induced leakage current characteristics of PMOS fabricated by a new multi-deposition multi-annealing technique with full gate last process | ||
| Journal | Chinese Physics B | ||
| Authors | Wang, Yanrong | Author | |
| Yang, Hong | Author | ||
| Xu, Hao | Author | ||
| Luo, Weichun | Author | ||
| Qi, Luwei | Author | ||
| Zhang, Shuxiang | Author | ||
| Wang, Wenwu | Author | ||
| Yan, Jiang | Author | ||
| Zhu, Huilong | Author | ||
| Zhao, Chao | Author | ||
| Chen, Dapeng | Author | ||
| Ye, Tianchun | Author | ||
| Year | 2017 (August) | Volume | 26 |
| Publisher | IOP Publishing | ||
| DOI | doi:10.1088/1674-1056/26/8/087304Search in ResearchGate | ||
| Generate Citation Formats | |||
| Mindat Ref. ID | 6008568 | Long-form Identifier | mindat:1:5:6008568:3 |
| GUID | 0 | ||
| Full Reference | Wang, Yanrong, Yang, Hong, Xu, Hao, Luo, Weichun, Qi, Luwei, Zhang, Shuxiang, Wang, Wenwu, Yan, Jiang, Zhu, Huilong, Zhao, Chao, Chen, Dapeng, Ye, Tianchun (2017) Stress-induced leakage current characteristics of PMOS fabricated by a new multi-deposition multi-annealing technique with full gate last process. Chinese Physics B, 26. 87304pp. doi:10.1088/1674-1056/26/8/087304 | ||
| Plain Text | Wang, Yanrong, Yang, Hong, Xu, Hao, Luo, Weichun, Qi, Luwei, Zhang, Shuxiang, Wang, Wenwu, Yan, Jiang, Zhu, Huilong, Zhao, Chao, Chen, Dapeng, Ye, Tianchun (2017) Stress-induced leakage current characteristics of PMOS fabricated by a new multi-deposition multi-annealing technique with full gate last process. Chinese Physics B, 26. 87304pp. doi:10.1088/1674-1056/26/8/087304 | ||
| In | (n.d.) Chinese Physics B Vol. 26. IOP Publishing | ||
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