Reference Type | Journal (article/letter/editorial) |
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Title | The deconvolution of sputter-etching surface concentration measurements to determine impurity depth profiles |
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Journal | Surface and Interface Analysis |
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Authors | Carter, G. | Author |
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Katardjiev, I. V. | Author |
Nobes, M. J. | Author |
Year | 1989 (September) | Volume | 14 |
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Issue | 9 |
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Publisher | Wiley |
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DOI | doi:10.1002/sia.740140905Search in ResearchGate |
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| Generate Citation Formats |
Mindat Ref. ID | 6502303 | Long-form Identifier | mindat:1:5:6502303:1 |
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GUID | 0 |
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Full Reference | Carter, G., Katardjiev, I. V., Nobes, M. J. (1989) The deconvolution of sputter-etching surface concentration measurements to determine impurity depth profiles. Surface and Interface Analysis, 14 (9). 511-523 doi:10.1002/sia.740140905 |
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Plain Text | Carter, G., Katardjiev, I. V., Nobes, M. J. (1989) The deconvolution of sputter-etching surface concentration measurements to determine impurity depth profiles. Surface and Interface Analysis, 14 (9). 511-523 doi:10.1002/sia.740140905 |
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In | (1989, September) Surface and Interface Analysis Vol. 14 (9) Wiley |
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