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Bauters, J. F., Fenlon, R. E., Seibert, C. S., Yuan, W., Plunkett, J. S. B., Li, J., Hall, D. C. (2011) Oxygen-enhanced wet thermal oxidation of GaAs. Applied Physics Letters, 99 (14). 142111pp. doi:10.1063/1.3647579

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Reference TypeJournal (article/letter/editorial)
TitleOxygen-enhanced wet thermal oxidation of GaAs
JournalApplied Physics Letters
AuthorsBauters, J. F.Author
Fenlon, R. E.Author
Seibert, C. S.Author
Yuan, W.Author
Plunkett, J. S. B.Author
Li, J.Author
Hall, D. C.Author
Year2011 (October 3)Volume99
Issue14
PublisherAIP Publishing
DOIdoi:10.1063/1.3647579Search in ResearchGate
Generate Citation Formats
Mindat Ref. ID8596456Long-form Identifiermindat:1:5:8596456:9
GUID0
Full ReferenceBauters, J. F., Fenlon, R. E., Seibert, C. S., Yuan, W., Plunkett, J. S. B., Li, J., Hall, D. C. (2011) Oxygen-enhanced wet thermal oxidation of GaAs. Applied Physics Letters, 99 (14). 142111pp. doi:10.1063/1.3647579
Plain TextBauters, J. F., Fenlon, R. E., Seibert, C. S., Yuan, W., Plunkett, J. S. B., Li, J., Hall, D. C. (2011) Oxygen-enhanced wet thermal oxidation of GaAs. Applied Physics Letters, 99 (14). 142111pp. doi:10.1063/1.3647579
In(2011, October) Applied Physics Letters Vol. 99 (14) AIP Publishing

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