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Fu, En-Gang, Zhuang, Da-Ming, Zhang, Gong, Yang, Wei-Fang, Zhao, Ming (2003) Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering. Applied Surface Science, 217. 88-94 doi:10.1016/s0169-4332(03)00523-3

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Reference TypeJournal (article/letter/editorial)
TitleSubstrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering
JournalApplied Surface Science
AuthorsFu, En-GangAuthor
Zhuang, Da-MingAuthor
Zhang, GongAuthor
Yang, Wei-FangAuthor
Zhao, MingAuthor
Year2003 (July)Volume217
PublisherElsevier BV
DOIdoi:10.1016/s0169-4332(03)00523-3Search in ResearchGate
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Mindat Ref. ID9905369Long-form Identifiermindat:1:5:9905369:3
GUID0
Full ReferenceFu, En-Gang, Zhuang, Da-Ming, Zhang, Gong, Yang, Wei-Fang, Zhao, Ming (2003) Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering. Applied Surface Science, 217. 88-94 doi:10.1016/s0169-4332(03)00523-3
Plain TextFu, En-Gang, Zhuang, Da-Ming, Zhang, Gong, Yang, Wei-Fang, Zhao, Ming (2003) Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering. Applied Surface Science, 217. 88-94 doi:10.1016/s0169-4332(03)00523-3
In(n.d.) Applied Surface Science Vol. 217. Elsevier BV

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